SSM 6100 System
The SSM 6100 Advanced Implant Metrology System makes rapid, in-line measurement of electrical parameters associated with most near-surface implants including source/drain. The system has excellent sensitivity over a wide range of implant dose. In addition to single spot measurements the SSM 6100 can make high resolution maps and line profile.
The system contains a class 1 mini-environment and meets applicable SEMI and CE standards.
SSM FastGate® Systems use a small elastic probe to form a temporary gate on the dielectric surface. An integrated pattern recognition system locates scribe line test areas. The elastic probe has a diameter of less than 30 µm and does not damage the dielectric surface.
Measurement Parameters
- Average Surface Doping (NSURF)
- Flatband Voltage (Vfb)
- Threshold Voltage (VT)