AMS-3300
Semilab AMS SW3300 and Semilab AMS SW3300A
The SurfaceWave Family of Products
The SW3300 offers:
- Metrology for mixed 200/300 or 150/200 mm wafers
- Superior measurement of bottle trench, straight trench, dielectric layer thickness and composition
- Exacting measurements at the 110 nm node and below
Features:
- Robust, solid-state lasers with lifetime greater than 1 year
- Precise and repeatable pattern measurement
- Lowest ownership cost of any non-contact system on the market
- Easy to use
- Proven track record of reliability
- Semilab AMS quality and durability
Semilab AMS SW3300A
The advanced SW 3300A was announced mid-year 2007. It contains the same features as the SW 3300, and adds multiple layer measurements. A full product brochure may be downloaded here.