SE5E
The Ideal thin Film characterization Tool for development & Pilot Line
The SE5E has been designed to fit the need of development and pilot line either for microelectronic, flat panels displays and coating industries. The SE5E is based on a GES5E; it can be mounted with high speed stage, handling robot and a fast pre-alignment station for wafer to achieve equivalent throughput than production tools. The SE5E has the same characteristics than the GES5E in term of spectral range, Performances and spot size.
A top frame with Hepa Filter and a production type software can be added to the SE 5.
Applications:
- Dielectric Characterization
Technologies:
- Spectroscopic Ellipsometry