WT-3000
The WT-3000 is a powerful standalone measurement platform for performing many different semiconductor material characterization measurements. The base system includes all the overhead functions necessary to perform characterization measurements, including power supplies, computer and operating software, R-Θ measurement stage, etc. Each system in then configured to the user’s requirements by adding treatment and measurement capabilities.
It is possible to integrate all measurement techiques in one mapping instrument. WT-3000 is designed to meet SEMI standards.
Applications:
- Contamination Monitoring
- Dielectric Characterization
- Epi Layer Monitoring
- Ion Implant Monitoring
Technologies:
- JPV
- SPV Diffusion Length
- UVPCD Epi-lifetime
- VQ oxide monitoring
- µ-PCD Lifetime