WT-2500
The WT-2500 is a powerful standalone measurement platform for performing many different semiconductor material characterization measurements. The base system includes all the overhead functions necessary to perform characterization measurements, including power supplies, computer and operating software, XY measurement stage, etc. Each system in then configured to the user’s requirements by adding treatment and measurement capabilities.
It is possible to integrate all of the following measurement techiques in one mapping instrument:
- Microwave induced photoconductive decay
- (µ-PCD) and Charge-PCD / minority carrier lifetime mapping
- Surface Photovoltage (SPV) / diffusion length mapping
- Iron (Fe) concentration mapping
- Copper (Cu) concentration measurement
- High intensity laser source for µ-PCD or SPV
- Voltage – Charge (V-Q) / oxide and interface characterization technique
- Mobile ion measurement
- Junction Photo-Voltage measurement for sheet resistance mapping
- Ion Implant Monitoring
WT-2500 TREATMENTS
- Hot chuck / desorber
- Linear corona charger and pin charger
- Optical flash
- PTC – Low Temperature RTP
Specifications:
- Brooks LP for fully automatic operation (FOUP & FOSB) of 150-200 mm and 200-300 mm wafers
- Clean Room Class 10 compatible
- Integrated mini-environment
- SECS/GEM compatible
- Ease of use software with GUI
- Additional manual loading capabilities (e.g. for R&D)
- Various metrology measurement capabilities including x-y mapping
- Various pre-treatment chambers
- Vibration isolated table
- Easy serviceability
- Simple hook-up (compressed air, vacuum, line voltage)
- Small footprint (120x180 cm)
- Powder painted aluminum housing
Application：
- Contamination Monitoring
- Dielectric Characterization
- Epi Layer Monitoring
- Ion Implant Monitoring
Technologies:
- JPV
- SPV Diffusion Length
- UVPCD Epi-lifetime
- VQ oxide monitoring
- µ-PCD Lifetime